| Mr. Duan Jindi, Tel. 13971036507 | |
|
Mr. Jiang Chao, Tel. 18971299299 |
E-mail：icse2024@126.com |
| Dr. Liu Mingming， Tel. 19862516876 |
E-mail：mmliu@sdut.edu.cn |
| Dr. Zhu Jian， Tel. 15810878528 | E-mail: zhujian@sdut.edu.cn |
| Dr. Zhang Xiuli， Tel. 15064351998 |
E-mail: zhangxiulli@163.com |
|
Prof. Guo Qianjian, Tel. 13969397001 |
The vacuum interconnected nanotech workstation (nano-x):a new paradigm for surface and interface science research
ID：36
Submission ID：40 View Protection：ATTENDEE
Updated Time：2024-10-14 11:10:15
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Oral Presentation
Start Time：2024-10-19 11:30 （Asia/Shanghai）
Duration：15min
Session：[S2] Thin Film Technologies and Applications » [S2A] Session 2A
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Abstract
The Vacuum Interconnected Nanotech Workstation (Nano-X) is located in the Suzhou Dushu Lake Science and Education Innovation District, which is co-built by the CAS, Jiangsu Province, SuzhouCity and Suzhou Industrial Park. The construction started in April 2014 and completed the phase-l and ll in June 2019 and February 2023, respectively. lt is the world's largest multifunctional research platform for nano-science and nano-technology, which integrates the state-of art capabilities of material growth, device fabrication and characterization/tests together under ultra-high vacuum environment, By connecting different instruments to ultra-high vacuum pipelines, NANO-X is aimed to solve residual particles surface/interface oxides and adsorptions and other contaminations problems, which are intractable in conventional cleanrooms.
Keywords
ultra-high vacuum,surface intersurface
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