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The vacuum interconnected nanotech workstation (nano-x):a new paradigm for surface and interface science research
编号：36
稿件编号：40 访问权限：仅限参会人
更新：2024-10-14 11:10:15
浏览：303次
口头报告
报告开始：2024年10月19日 11:30 （Asia/Shanghai）
报告时间：15min
所在会议：[S2] Thin Film Technologies and Applications » [S2A] Session 2A
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摘要
The Vacuum Interconnected Nanotech Workstation (Nano-X) is located in the Suzhou Dushu Lake Science and Education Innovation District, which is co-built by the CAS, Jiangsu Province, SuzhouCity and Suzhou Industrial Park. The construction started in April 2014 and completed the phase-l and ll in June 2019 and February 2023, respectively. lt is the world's largest multifunctional research platform for nano-science and nano-technology, which integrates the state-of art capabilities of material growth, device fabrication and characterization/tests together under ultra-high vacuum environment, By connecting different instruments to ultra-high vacuum pipelines, NANO-X is aimed to solve residual particles surface/interface oxides and adsorptions and other contaminations problems, which are intractable in conventional cleanrooms.
关键字
ultra-high vacuum,surface intersurface
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